|
| 气载微业洁净等级（ISO 14644-1） |
|
|
| ISO Classification Number |
Maxlmum Concentration limit(particles/M3of air)
equal to or larger than considered sizes shown bolew |
| 0.1um |
0.2um |
0.3um |
0.5um |
1um |
5um |
| ISI01 |
10 |
2 |
|
|
|
|
| ISI02 |
100 |
24 |
10 |
4 |
|
|
| ISI03 |
1,000 |
237 |
102 |
35 |
|
|
| ISI04 |
10,000 |
2,370 |
1020 |
352 |
83 |
|
| ISI05 |
100,000 |
237,000 |
10,2000 |
3,520 |
832 |
29 |
| ISI06 |
1,000,000 |
237,000 |
102,000 |
35,5200 |
8,320 |
293 |
| ISI07 |
|
|
|
352,000 |
83,200 |
2,930 |
| ISI08 |
|
|
|
3,520,000 |
832,000 |
29,300 |
| ISI09 |
|
|
|
35,200,000 |
8,320,000 |
293,000 | | | |